Mfg. quartz crucible for Czochralski semiconductor crystals

摘要

A graphite melting pot in a rotating housing (22) is filled with quartz sand particles (10). Centrifugal force causes the sand to cling to the sides of the vessel in the desired form of the crucible. Electrodes (14) form a luminous arc that rapidly melts the particles to create the crucible (18). He or N2 is introduced through a pipe (34) and passed, by means of vacuum, spacers and openings (26,30) in the graphite vessel, through the forming crucible to replace the residual gases. This reduces the formation of bubbles and fills the cavities so formed with He or N2.