发明名称 Environmetally safe dispensing assembly for ultra-pure liquid chemicals
摘要 <p>The method involves using a chemical reservoir with an integral dispensing passage, an integral rinsing passage, and an integral refilling passage. The reservoir and the passages are all contained in a unitary housing which can be disconnected from a production line. Initially, the refilling passage is closed and the rinsing passage is opened. The dispensing passage is then opened and a stream of a rinsing material is admitted into the reservoir through the rinsing passage, purging the reservoir of chemical residue. The rinsing material and purged chemical residue is then withdrawn from the reservoir through the dispensing passage and the rinsing passage is closed. The dispensing passage is then closed followed by the opening the refilling passage. A supply of fresh chemical is admitted into the reservoir through the refilling passage to refill the reservoir. The refilling passage is then closed.</p>
申请公布号 EP0712658(A2) 申请公布日期 1996.05.22
申请号 EP19950307103 申请日期 1995.10.06
申请人 OCG MICROELECTRONIC MATERIALS, INC. 发明人 DARAKTCHIEV, IVAN S.
分类号 B01J4/00;B08B9/08;B67D7/02;(IPC1-7):B01J4/00 主分类号 B01J4/00
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