| 摘要 |
<p>PURPOSE: To provide a wafer housing which can cope with the miniaturization and the space reduction of a manufacturing equipment. CONSTITUTION: A wafer housing 1 is provided with a pair of side boards 2 which are arranged so as to leave a specified space for arranging a plurality of wafers 10 in almost parallel in the space, and a bellows 3 which is constituted of at least three expansion members. These expansion members have a plurality of trenches 3a into which the peripheral parts of a plurality of the wafers 10 are inserted along the longitudinal direction, and are arranged so as to freely expand in response to the change of gap between a pair of the side boards 2 and almost perpendicularly to the side boards 2 in the state that the members connect the part between a pair of the side boards 2. The pitches of a plurality of the trenches are variable in response to expansion and contraction.</p> |
