| 摘要 |
PURPOSE: To provide a device capable of producing aq. acidic oxidizing soln. of aq alkaline reducing soln. suitable for washing a semiconductor, etc., by using a pure electrolytic water hardly incorporated with impurities and capable of easily controlling the oxidation-reduction potential or pH thereof. CONSTITUTION: The three-chamber type electrolytic cell 1 is constituted of three-chamber of an anode chamber 6, a cathode chamber 8 and an intermediate chamber 7 provided between the anode chamber 6 and the cathode chamber 8 by being partioned with a pair of diaphragms, and also supply pipes 9, 10 and 11 supplying respectively a raw water and discharge pipes 14, 15 and 16 discharging a treated water are connected to the three chambers, and an acid adding means 12 is provided in a discharge pipe 14 from the anode chamber, also an alkali adding means 13 is provided in a discharge pipe 16 from the cathode chamber 8 to control at least either one of a composition, concn., addition and pH of an electrolyte to the added. |
