| 摘要 |
PURPOSE: To improve the orientability of the constituting particles of deposited thin films and to improve electromagnetic conversion characteristics by confining the incident angle of a magnetic material on a base in the direction intersecting with the relative moving direction of the base to <=50 deg.. CONSTITUTION: The length L in a heating region for a magnetic metal 10 of an evaporating source 8 in the transverse direction W of a base film 11 on a cooling can 7 is set small with respect to the distance D between the base film 11 and the evaporating source 8, by which the incident angleθof the vapor 18 of the magnetic metal 10 on the base film 11 is set in a range of <=50 deg.. The magnetic metal 10 is evaporated in the evaporation region of the length L from the evaporating source 8 in such a manner and the vapor 18 thereof is made incident on the base film 11 at the incident angleθof <=50 deg. and is deposited thereon, by which the variation in the incident direction from the evaporation region of the length L is decreased. Then, the orientability of the particles of the magnetic metallic thin film formed on the base film 11 is good in the longitudinal direction of the base film 11 and is improved in the transverse direction W as well. The excellent electromagnetic conversion characteristics including a high squareness ratio are thus obtd.
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