发明名称 MOVING DEVICE
摘要 PURPOSE: To obtain a large amount of relative movement and accurately achieve positioning by providing a support body by the application voltage of a first voltage supply part and a second voltage supply part for applying a DC voltage to an electromechanical transducer to obtain an amount of relative movement smaller than the amount of relative movement with an object. CONSTITUTION: This item is provided with a first voltage supply part 36a for applying an asymmetrical voltage to electromechanical transducers 31 and 32 so that a vibration body 34 joined to electromechanical transducers 31 and 32 to vibrate, a support body 33, and an object in contact with the vibration body 34 are moved relatively. Further, to obtain an amount of relative movement smaller than the amount of relative movement between the support body 33 and the object due to the application voltage of the first voltage supply part 36a, a second voltage supply part 36b for applying a DC voltage to the electromechanical transducers 31 and 32 is provided. Then, a moving body 35 is placed on the vibration body 34 and a stand 33 and the moving body 35 are relatively moved, thus bringing close to the target amount of relative movement regardless of the amount of relative movement.
申请公布号 JPH08130887(A) 申请公布日期 1996.05.21
申请号 JP19940266733 申请日期 1994.10.31
申请人 NIKON CORP 发明人 FUKUDA TAIICHIRO
分类号 H02N2/00 主分类号 H02N2/00
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