发明名称 COATING METHOD OF COLOR FILTER RESIST
摘要 <p>PURPOSE: To reduce the use amt. of a photopolymerizable compsn. containing a color material in the production of a color filter and to uniformly apply a coating liquid on a transparent substrate. CONSTITUTION: Coating is performed in at least two stages of precoating and main coating after the precoating. Precoating is performed in such a manner that the film thickness of the coating liquid is 10 to 50μm and the proportion of a non-coated area in the peripheral part of the transparent substrate is <40% of the whole surface area to be coated. Then main coating is performed by using a spin coating device. By coating in two stages, splashing of a coating liquid can be reduced. By performing the precoating process under specified coating conditions, uniformity of coating is improved, coating with a high deposition rate is possible, and the use amt. of the resist for a color filter can be decreased. Even a coating liquid having high viscosity and thixotropy can be uniformly applied. Even when a transparent substrate having a large area is used, uniform coating is realized on the peripheral part of the substrate. Further, a low-cost color filter or a large-size color filter can be realized.</p>
申请公布号 JPH08129104(A) 申请公布日期 1996.05.21
申请号 JP19940266513 申请日期 1994.10.31
申请人 MITSUBISHI CHEM CORP 发明人 URANO TOSHIYOSHI;HINO ETSUKO;YAMAUCHI YASUTSUGU
分类号 G03F7/16;G02B5/20;H01L21/027;(IPC1-7):G02B5/20 主分类号 G03F7/16
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