| 摘要 |
PURPOSE: To obtain a lead inspection method in which the bend in the vertical direction of a lead is inspected precisely without lowering the inspection speed and without increasing the cost of an inspection system. CONSTITUTION: A semitransparent screen 10 is installed on an inspection stage 2 on which a work W is set. A first illuminator 3 is installed so as to be situated at the upper part of the inspection stage 2, and a second illuminator 4 is installed so as to be situated at the upper part of the inspection stage 2 and on the tip side of a lead 9 for the work W. By a first beam of light B1 emitted from the first illuminator 3 and a second beam of light B2 which is emitted from the second illuminator 4 and which forms a prescribed angleθto the first beam of light B1 , two shadows of the lead 9 are projected on the screen 10. The screen 10 is imaged by a CCD camera 6, the difference between two lengths is found by an image processor 7 on the basis of pieces of the image data, and the bend in the vertical direction of the lead 9 is inspected on the basis of the difference.
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