APPARATUS FOR TESTING INTEGRATED CIRCUIT

摘要

PURPOSE: To provide a highly sensitive and highly stable testing device for testing an integrated circuit with little disturbances to the circuit in an electrooptic sampling method. CONSTITUTION: A probe light (laser light) 5 is brought into an electrooptic crystal element 1 which is arranged in the vicinity of an integrated circuit (circuit board) 4 to be tested and changes its index of double refraction due to an electric field. A testing electric signal is inputted to the circuit 4 and a change of the polarization state of the probe light 5 resulting from the inputting of the electric signal is detected. A signal electric field corresponding to the electric signal is measured. The integrated circuit is evaluated from the measured signal electric field. The electrooptic crystal element 1 is formed of rubidium titanate phosphate or potassium titanate arsenate which has a low dielectric constant, a low index of refraction, a large electrooptic constant and a high optical damage threshold value with showing a small change in the index of refraction due to temperatures.