| 发明名称 |
Etching molydbenum with ferric sulfate and ferric ammonium sulfate |
| 摘要 |
A molybdenum etching process which reduces hazardous treatment waste is disclosed. Etchants which can be used are ferric sulfate and ferric ammonium sulfate. Waste products resulting from this etch are Fe(OH)3 and CaSO4.
|
| 申请公布号 |
US5518131(A) |
申请公布日期 |
1996.05.21 |
| 申请号 |
US19940250896 |
申请日期 |
1994.07.07 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CHEN, HSING H.;DAVID, LAWRENCE D.;HARRIS, DEREK B. |
| 分类号 |
C23F1/26;H01L21/3213;(IPC1-7):C01G39/00 |
主分类号 |
C23F1/26 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
