| 摘要 |
PURPOSE: To provide a drive circuit of an ultrasonic motor which can obtain a proper number of cycles in a simple configuration and is capable of an accurate positioning even if an ultrasonic motor is used for positioning. CONSTITUTION: An ultrasonic motor 8 is provided with a moving body, an ultrasonic vibrator for driving the moving body, a piezoelectric element for exciting ultrasonic vibration at the ultrasonic vibrator due to the application of alternate voltage, and a frequency generator for generating an alternate voltage with a frequency closer to the resonance point of the ultrasonic vibrator. Therefore, power amplifiers 6 and 7 for applying an alternate voltage to a piezoelectric element, a cycle pulse generation part 5 for adjusting the power applied to the piezoelectric element via the power amplifiers 6 and 7 according to the number of pulses, a command analysis part 1 for converting the moving command for the moving body to absolute value data and codes, an application pattern storage part 2 for storing the number of pulses to be applied according to the absolute value data at a table, and a phase determination part 3 for judging the codes are provided. |
