发明名称 Fabrication processes for monolithic electronic modules
摘要 This invention comprises various high production methods for simultaneously forming surface metallizations on a plurality of monolithic electronic modules. Each monolithic electronic module may comprise a single semiconductor chip or multiple semiconductor chips. The methods can employ a workpiece which automatically discontinues side surface metallization between different electronic modules in the stack. Multiple workpieces are interleaved within the stack between the electronic modules. Each workpiece may include a transfer layer(s) for permanent bonding to an end surface of an adjacent electronic module in the stack. This transfer layer may comprise an insulation layer, a metallization layer, an active circuit layer, or any combination thereof. End surface metallization can thus be provided contemporaneous with side surface metallization of multiple electronic modules.
申请公布号 US5517754(A) 申请公布日期 1996.05.21
申请号 US19940252794 申请日期 1994.06.02
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BEILSTEIN, JR., KENNETH E.;BERTIN, CLAUDE L.;HOWELL, WAYNE J.
分类号 H01L21/28;H01L21/98;H01L25/065;(IPC1-7):H05K3/34 主分类号 H01L21/28
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