PROCESS EQUIPMENT HAVING MIXING MEANS,申请号JP19940289036-传众专利搜索

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发明名称	PROCESS EQUIPMENT HAVING MIXING MEANS
摘要
申请公布号	JPH08130201(A)	申请公布日期	1996.05.21
申请号	JP19940289036	申请日期	1994.10.28
申请人	DISCO ABRASIVE SYST LTD	发明人	MORI TAKASHI
分类号	B08B3/04;H01L21/02;H01L21/304;(IPC1-7):H01L21/304	主分类号	B08B3/04
代理机构		代理人
主权项
地址

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