发明名称 |
SCANNING NEAR VISUAL FIELD INTERATOMIC FORCE MICROSCOPE HAVING SUBMERGED OBSERVING FUNCTION |
摘要 |
PURPOSE: To observe a boiological sample or an org. memberane sample in a liquid by arranging a liquid surface holding window plate at a position holding a liquid in which the sample is immersed between the window plate and a liquid holding sample tray by surface tension. CONSTITUTION: A sample 1 is immersed in the arbitrary liquid 3 held in a liquid holding sample tray 2. A liquid surface holding window plate 10 is set to height so that a liquid layer is formed between the window plate 10 and the sample tray 2 by surface tension when the tip of a probe 7 is allowed to approach the surface of the sample 1. The laser beam emitted from a laser beam source transmits through the window plate 10 to be reflected by a reflecting surface and the reflected beam is introduced into a photoelectric conversion element 13 to be converted to an electric signal to be sent to a controller 14. The controller 14 controls the approach of the probe 7 to the sample 1 and also controls height by an XYZ scanner 6 so that the bending of the probe 7 does not exceed a prescribed value at the time of surface observation. |
申请公布号 |
JPH08129017(A) |
申请公布日期 |
1996.05.21 |
申请号 |
JP19950237730 |
申请日期 |
1995.08.23 |
申请人 |
SEIKO INSTR INC |
发明人 |
HONMA KATSUNORI;MURAMATSU HIROSHI;CHIBA TOKUO |
分类号 |
G01B21/30;G01B7/34;G01B11/30;G01N37/00;G01Q30/12;G01Q30/14;G01Q30/20;G01Q60/06;G01Q60/18;G01Q60/24;G01Q60/32;G01Q80/00;G02B21/00;H01J37/28;(IPC1-7):G01N37/00 |
主分类号 |
G01B21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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