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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH08130195(A)
申请公布日期
1996.05.21
申请号
JP19940268727
申请日期
1994.11.01
申请人
MITSUBISHI ELECTRIC CORP
发明人
MORIHARA TOSHINORI
分类号
H01L21/28;H01L21/306;H01L21/316;H01L21/76;H01L21/768;H01L23/522;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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