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发明名称
DEVICE FOR CATHODE SPRAYING OF FERROELECTRICS IN VACUUM
摘要
申请公布号
RU751166(C)
申请公布日期
1996.05.20
申请号
SU19791899455
申请日期
1979.03.30
申请人
KIEVSKIJ POLITEKHNICHESKIJ INSTITUT IM.50-LETIYA VELIKOJ OKTYABRSKOJ SOTSIALISTICHESKOJ REVOLYUTSII
发明人
NEKRASOV M.M.;LEVCHENKO G.T.;SIGAEV A.L.
分类号
C23C14/34;(IPC1-7):C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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