发明名称 |
Pressure controlled cryopump regeneration method and system |
摘要 |
In a subatmospheric regeneration process, a relief valve and a roughing valve are coupled in parallel to a common roughing pump. During regeneration, the cryopump is warmed to release gases from cryopump stages. The relief valve opens at a first cryopump pressure level less than a predetermined maximum pressure. The maximum pressure is subatmospheric. The relief valve closes when the cryopump pressure drops below a second cryopump pressure level. Pressure in a line between the relief valve and the roughing pump is monitored to control the opening of the roughing valve to the roughing pump.
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申请公布号 |
US5517823(A) |
申请公布日期 |
1996.05.21 |
申请号 |
US19950374140 |
申请日期 |
1995.01.18 |
申请人 |
HELIX TECHNOLOGY CORPORATION |
发明人 |
ANDEEN, BRUCE R.;FORTIER, GERALD J.;BARTLETT, ALLEN J.;EACOBACCI, MICHAEL J.;LESSARD, PHILIP C. |
分类号 |
F04B37/08;F04B37/16;(IPC1-7):B01D8/00 |
主分类号 |
F04B37/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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