| 摘要 |
PURPOSE: To improve the heat resistance and chemical resistance and to reduce the heating in vapor deposition or sputtering of a transparent conducting film and the damage in patterning by making a saturated water solution of compounds containing a material constituting an insulating material contain a coloring element, making the saturated water solution oversaturated to deposit the insulating material and forming an insulating film. CONSTITUTION: Black matrices 202 are formed on a substrate 201. Next, silica is dissolved in hydrofluosilicic acid H2 SiF6 to form saturated water solution and a substrate 201 is immersed therein. After that, aluminum or the like is added to make an oversaturated state to deposit and grow a silicon oxide film on the surface of the substrate. At this time, when a pigment is added to the water solution, since the silicon oxide film to which the desired pigment is added is formed, first, the silicon oxide film to which a red pigment is added is formed and a red pattern 203 is formed by patterning and similarly green and blue patterns 204, 205 are formed in order to complete a color filter. |
