ALIGNER AND MANUFACTURE OF SEMICONDUCTOR BY USE OF IT

摘要

PURPOSE: To accurately obtain the transmission factor of a reticule in a short time. CONSTITUTION: An aligner is equipped with a reticule hand 45 which transfers a reticule taken out of a reticule cassette 40 to an exposure station 47 along a reticule transfer route and a measuring device 60 which measures the transmission factor of the reticule while the reticule is transferred along the reticule transfer route.