| 摘要 |
PURPOSE: To simplify structure to improve a fitting space to smoothly move a sample in an X-axis direction for a short time by integrating a mechanism, for moving a sample retaining rod and a sample holder in the X-axis direction, into the inside of a sample retaining device. CONSTITUTION: Cylindrical supporting members 2 and 3 are mounted on the sample chamber wall 1 of an electron microscope, and a spherical bearing 5 is formed on the tip inner surface of the supporting member 3. A first pipe 7, having a spherical swollen part 6 at a tip, is inserted into the inner peripheral side of the supporting member 3, and the bearing 5 is oscillation-freely supported on the swollen part 6 to be vacuum-sealed. A second pipe 15 is rotatably mounted in the first pipe 7 to be vacuum-sealed, and a third pipe 17 is slidably mounted in the second pipe 15 to fit a bellows 19 between the tips of the pipes 15 and 17. A sample holding rod 22 is slidably mounted in the third pipe 17 via an O ring, a sample holder 25 facing in a sample chamber 23 is linked to the tip of the sample holding rod 22, an operation part is linked to a rear end, and a pin 27 is provided in an intermediate part to be allowed engaging in a slit 20.
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