ADJUSTING MECHANISM FOR SCANNING PROBE MICROSCOPE

摘要

PURPOSE: To provide an adjusting mechanism between a probe and a sample which enables the realizing of a smaller size and a lighter weight of a scanning probe microscope. CONSTITUTION: An objective lend 104 of an optical microscope is set above a sample 102. A scanner unit 110 is mounted on the objective lens 104. The scanner unit 110 has an elastic ring 112 made of a magnetic material. The elastic ring 112 has a cut at one point and three balls 114 are arranged on an internal surface thereof at an equal interval. An electromagnet 116 is mounted on one end 112a of the cut to attract the other end 112b. An L-shaped arm 118 is mounted on the elastic ring 112 and a cylindrical piezoelectric element 120 is mounted sideways at the lower end thereof. A probe 130 is mounted at the tip of the cylindrical piezoelectric element 120 through a probe holding member 128.