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发明名称
ETCHING METHOD FOR MEMBER CONTAINING F MATERIAL
摘要
申请公布号
JPH08124910(A)
申请公布日期
1996.05.17
申请号
JP19940263687
申请日期
1994.10.27
申请人
SONY CORP
发明人
KADOMURA SHINGO
分类号
C01B33/10;C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C01B33/10
代理机构
代理人
主权项
地址
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