PARTICLE BEAM DEVICE PROVIDED WITH REFLECTED ELECTRON DETECTOR,申请号JP19940256545-传众专利搜索

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发明名称	PARTICLE BEAM DEVICE PROVIDED WITH REFLECTED ELECTRON DETECTOR
摘要
申请公布号	JPH08124512(A)	申请公布日期	1996.05.17
申请号	JP19940256545	申请日期	1994.10.21
申请人	JEOL LTD	发明人	MATSUTANI MIYUKI
分类号	H01J37/244;H01J37/252;(IPC1-7):H01J37/244	主分类号	H01J37/244
代理机构		代理人
主权项
地址

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