| 摘要 |
<p>PURPOSE: To provide a structure which allows a uniform temperature distribution in the suction plane for an electrostatic chuck which contains a heater. CONSTITUTION: A heating element to be buried in the insulator of an electrostatic chuck is constituted by dispersing a plurality of partial heating elements in the insulator. For example, the heating elements 3a and 3b are formed of resistance heating board or foil, electrodes 4 for power supply are also formed in board-shape or foil-shape and both heating elements and electrodes are buried in two layers parallel to the suction plane in the insulator 1. Thus, parallel connection of all the heating elements 3a and 3b are easily allowed, and reduction of the difference between the heat of the heating elements is easily allowed.</p> |
