ACCELERATION SENSOR AND ITS MANUFACTURE

摘要

PURPOSE: To improve the sensitivity and yield of an acceleration sensor and increase the mass of a weight part without enlarging a chip in size. CONSTITUTION: The acceleration sensor is formed of silicon. A beam 12 is formed at an opening 11b at the side of the front surface of a hollow part 11a at the central part of a substrate 11. A first weight part 13 formed of silicon is provided at the rear side of the beam 12 and a second weight part 15 formed of silicon is securely fixed to the first weight part 13.