发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE: To obtain an electron wave interference element suitable for fine patterning and high integration in which the switching function is provided utilizing a principle different from that for MOSFET transistor. CONSTITUTION: In an electron wave interference element where the conduction of carrier between input and output electrodes is controlled through modulation of electron wave, an electric field is applied to a plurality of carrier conduction paths 10 formed perpendicularly to the conducting direction of carrier between a source electrode 4 and a drain electrode 9 formed while being isolated electrically. Consequently, the energy level of the carrier conduction path 10 is varied and an electron wave passing through the carrier conduction path 10 is modulated.
申请公布号 JPH08125161(A) 申请公布日期 1996.05.17
申请号 JP19940258502 申请日期 1994.10.24
申请人 TOSHIBA CORP 发明人 MARUYAMA TORU;OWAKI YUKITO;NOGUCHI MITSUHIRO
分类号 H01L29/68;H01L21/338;H01L29/06;H01L29/66;H01L29/778;H01L29/812;(IPC1-7):H01L29/68 主分类号 H01L29/68
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