| 摘要 |
PURPOSE: To read a heat dependence detector signal at an accurate atmosphere temperature. CONSTITUTION: A first temperature sensing sensor 6, a second temperature sensing sensor 7, and a heat dependency detector (moisture sensor) 8 are provided at a sealing side with a slow thermal response, a free edge side with a fast thermal response, and a second temperature sensing sensor 7 of the free edge side, respectively, on the SiO2 film surface of a sheet-shaped Si substrate 2 which is supported in a cantilever shape where one edge side is fixed onto a base plate 1. The temperature when the temperature detected by the first temperature sensing sensor 6 and that detected by the second temperature sensing sensor 7 become equal to each other is an ambient temperature. The temperature of the heat dependence detector is read at this point. |
