| 摘要 |
PURPOSE: To dry droplets without heating a substrate itself so that at the time of drying droplets on a substrate sample, impurity metal is not diffused in the substrate. CONSTITUTION: A drier comprises a sample mount table 1 for installing a Si wafer 4 on which droplets 5 to be dried are placed, and a far infrared lamp 2 disposed above the table, wherein a filter 3 of the same material quality (Si) as that of a substrate sample is disposed between the sample mount table 1 and the far infrared lamp 2. The filter 3 transmits an infrared ray of such a wavelength as to dry the droplets 5 efficiently, but removes an infrared ray of such a wavelength as to heat the Si wafer 4, so that the droplets 5 can be quickly dried without heating the Si wafer 4. |
