CHAMBER MECHANISM AND ITS GAS CONTROL METHOD,申请号JP19940253985-传众专利搜索

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发明名称	CHAMBER MECHANISM AND ITS GAS CONTROL METHOD
摘要
申请公布号	JPH08124817(A)	申请公布日期	1996.05.17
申请号	JP19940253985	申请日期	1994.10.19
申请人	HITACHI LTD	发明人	MIYAZAKI TORU;TANABE YOSHIKAZU
分类号	H01L21/02;(IPC1-7):H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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