METHOD OF SPIN-ON-GLASS COATING LIQUID

摘要

Manufacturing method of siloxane type spin-on-glass(SOG) coating liquid to be used in semiconductor or LCD processing includes : (a) hydrolysis of mixture of tetraalkoxysilane(Si-(OR1)4), trialkoxysilane(R3-Si-(OR2)3) and isopropylalcohol with an acid mixture made of water, isopropylalcohol and various acid at room temperature, (b) dilution of reaction product with solvent mixture. The pH value of the coating liquid 1.5 to 4.5. in order to obtain high density thin film and improve storing stability.