| 摘要 |
PURPOSE: To apply reduction in size and easy maintenance to civilian equipment and apply it in many fields by holding in vacuum a heat insulation chamber formed by a cooling stage, a flange, an outer frame, etc. CONSTITUTION: Aluminum to become a shielding layer 8 is vapor deposited on the inner surface of a cylindrical outer frame 7 made of quartz glass. Then, the connecting part of the frame 7 to a flange 5 is coated with Pb-Sn alloy added with Zn, etc., by plasma spraying to form a welded layer 6. Thereafter, a low temperature device 2 is connected to a cooling stage 1 via an adhesive layer 3 made of In-Ga, the device 2, lead wires 9, and a connector 10 are connected, filled together with the frame in a vacuum chamber, and evacuated in vacuum. Thereafter, the frame 7 is connected to the flange 5 in the chamber, the layer 6 is heated to weld the frame 7 to the flange 5. Thus, the periphery of the device 2 is maintained in high vacuum to provide heat insulating function. |
