| 摘要 |
<p>PURPOSE: To improve reliability by a method wherein substrates in all slots of a substrate cassette are detected at a stretch and the throughput of a substrate alignment device is improved while the substrates are detected stably regardless of the shapes of substrate edges by using a contact type sensor such as a microswitch. CONSTITUTION: A plurality of microswitches 8 are connected in a rod shape while interposing spacers at the same space as the slot space of a substrate cassette, in which a plurality of substrates 3 are stored, to form alignment rods 10, and actuators such as cylinders 5 pushing each microswitch 8 against the substrates 3 in the slots of the substrate cassette are connected to the alignment rods 10.</p> |
