METHOD FOR BRAKING SEMICONDUCTOR WAFER AND ITS DEVICE

摘要

PURPOSE: To favorably and readily divide a semiconductor wafer each pellet. CONSTITUTION: Pinions 18 are fixed to both sides of a braking roller 21 and a weight 22 is abutted against an upper side of the braking roller 21 and a rack 23 fixed to both sides of the weight 22 engages with the pinions 18 of the braking roller 21. As the pinions 18 engaging with the rack 23 is rotated corresponding to straight movements of the weight 22, the braking roller 21 is compulsorily rotated. As the braking roller 21 is accurately rotated without laterally sliding against a semiconductor wafer 1, the semiconductor wafer 1 is favorably divided each pellet along a braking preliminary line.