HIGH-PRECISION MOUNTING TOOL, MANUFACTURE THEREOF, AND MOUNTING METHOD BY USE THEREOF

摘要

PURPOSE: To provide an improved mounting tool which is capable of displaying accurate and excellent characteristics even if a part is longer than a conventional one. CONSTITUTION: A mounting tool is used for bonding a bonding member through fusion by heating or thermocompression, wherein its rectangular surface which serves as a pressing surface is formed of polycrystalline diamond through a vapor phase synthesizing method and has such characteristics that it is of mirror-surface below 0.1μm in Rmax less than 3μm in evenness in its lengthwise direction, and has a maximtum temperature difference of below 1011) through the pressing surface when its center is kept at temperatures of 200 to 400 deg.C.