| 摘要 |
PURPOSE: To inspect the projections of a bump disk with high reliability by respectively detecting several pieces of reference projections formed on the surface of this disk with a projection detecting head. CONSTITUTION: The bump disk 8 is provided with three pieces of the reference projections T1 , T2 , T3 with respect to a standard projection Ts on the inner side at equal intervals on a radius R connecting the standard projection Ts and its center O. The disk is provide at its center with an opening 8 for mounting the disk 8 on a spindle 21. The heightsδh1 toδh3 of the respective reference projections T1 to T3 are nearly equal to the reference heightδhs of the standard projection Ts . While the intervals of these reference projections T1 to T3 are nearly equally (d), the distance ds between the reference projection T1 nearest the standard projection Ts and the standard projection Ts is ds >d. As a result, the selection of the standard projection Ts is facilitated and the detecting head is brought into collision against the standard projection Ts alone by arranging the standard projection Ts on the outer side.
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