发明名称 Removal of metal contamination
摘要 Generally, and in one form of the invention, a method is presented for the photo-stimulated removal of reacted metal contamination 16 from a surface 11, comprising the steps of: covering the surface with a liquid ambient 14; exciting the reacted metal contamination 16 and/or the liquid ambient 14 by photo-stimulation sufficiently to allow reaction of the reacted metal contaminantion 16 with the liquid ambient 14 to form metal products; and removing the liquid ambient 14 and the metal products from the surface 11. Other methods are also disclosed. <IMAGE>
申请公布号 EP0702400(A3) 申请公布日期 1996.05.15
申请号 EP19950118166 申请日期 1993.05.25
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 DOUGLAS, MONTE A.
分类号 H01L21/304;B08B3/10;B08B7/00;C23F4/00;H01L21/00;H01L21/306;H01L21/308 主分类号 H01L21/304
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