发明名称 MANUFACTURE FOR SEMICONDUCTOR DEVICE
摘要 PURPOSE:To reduce the switching loss without increasing the forward voltage drop, by injecting Au ions by the use of a mask for a part of the surface of a gate region before thermal diffusion, when forming diffusion region such as Au shich is the center of carrier trapping for the required parts of the gate region.
申请公布号 JPS53127278(A) 申请公布日期 1978.11.07
申请号 JP19770042884 申请日期 1977.04.13
申请人 MITSUBISHI ELECTRIC CORP 发明人 WATAKABE YAICHIROU;BETSUSHIYO MIKIO
分类号 H01L29/74;H01L29/10;H01L29/167 主分类号 H01L29/74
代理机构 代理人
主权项
地址