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发明名称
Verfahren und Einrichtung zur raeumlichen Homogenisierung von Mikrowellenplasmen
摘要
申请公布号
DD281698(B5)
申请公布日期
1996.05.15
申请号
DD19880317423
申请日期
1988.07.01
申请人
BUCK-WERKE GMBH.
发明人
OHL, ANDREAS, DR.;SCHMIDT, MARTIN, DR.;RUEGER, THEA.
分类号
H05H1/46;(IPC1-7):H05H1/46
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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