| 发明名称 |
Struktur mit differentieller Kapazität und Verfahren zu deren Herstellung |
| 摘要 |
A differential capacitor structure (10,74) includes a first static conductive layer (18,76) and a second static conductive layer (28,86) not electrically coupled to the first static conductive layer (18,76). A dynamic conductive layer (24,80) is suspended between the first (18,76) and second (28,86) static conductive layers. <IMAGE> <IMAGE> |
| 申请公布号 |
DE69209743(D1) |
申请公布日期 |
1996.05.15 |
| 申请号 |
DE1992609743 |
申请日期 |
1992.07.13 |
| 申请人 |
MOTOROLA, INC., SCHAUMBURG, ILL., US |
发明人 |
RISTIC, LJUBISA, PHOENIX, ARIZONA 86044, US;DUNN, WILLIAM C., MESA, ARIZONA 85213, US |
| 分类号 |
G01D5/24;G01D5/241;G01P15/00;H01L21/02;H01L21/311;H01L21/822;H01L27/04;H01L29/84;H01L29/92;H01L45/00 |
主分类号 |
G01D5/24 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
