发明名称 |
Verfahren zur mikrotechnischen Herstellung eines kapazitiven Differenzdrucksensors und mikrotechnisch hergestellter Differenzdrucksensor |
摘要 |
A surface layer and a sacrificial layer are deposited on a substrate. A conductive structural layer bridges over the sacrificial layer and is anchored to the surface layer for creating paired conductive areas. A backside opening is etched in the substrate for defining a flexible diaphragm layer of reduced thickness. The sacrificial layer is removed so that pressures exerted on the backside opening will cause a change in capacitance between the paired conductive areas. Temporary posts support the conductive structural layer as the sacrificial layer is removed. |
申请公布号 |
DE4402085(C2) |
申请公布日期 |
1996.05.15 |
申请号 |
DE19944402085 |
申请日期 |
1994.01.25 |
申请人 |
FORD-WERKE AG, 50735 KOELN, DE |
发明人 |
MASTRANGELO, CARLOS HORACIO, ANN ARBOR, MICH., US |
分类号 |
G01L9/12;B23P15/00;B81B3/00;B81C1/00;G01L9/00;G01L13/06;G01P15/08;H01L21/306;H01L21/68;H01L29/84;(IPC1-7):H01L21/306;H01L21/311;H01L49/00 |
主分类号 |
G01L9/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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