| 摘要 |
PURPOSE: To make a stopper movable so as to allow a chuck table to be rotated by one round or more by constituting in such a way that a movable part is moved to each reference position of a fixed part when a stopper member on the chuck table side presses the movable part of a stopper member on the base side. CONSTITUTION: When a chuck table 1 is rotated clockwise, a first. stopper member 3 makes one round and presses a movable part 4b placed in a neutral position N to move it to one end part (first reference position L) along a guide hole 4c, and stops. The movable part 4b is thereby moved by an angleθdeg. from the neutral position N to the first reference position L, so that the chuck table 1 can be rotated clockwise by about 360 deg.+θdeg..
|
