发明名称 |
Apparatus including ring-shaped resonators for producing microwave plasmas |
摘要 |
A low-pressure high-density plasma is excited in a plasma chamber surrounded by a cylindrical inner wall of a ring-shaped waveguide resonator to which the microwave energy is fed by a coupling from a microwave generator. The output coupling of the microwave energy from the standing wave maintained in the waveguide resonator to the plasma chamber is effected through a multiplicity of equispaced slits whose spacing is one half or one waveguide wavelength and which extend parallel to the generatrices of the cylindrical inner wall of the ring-shaped waveguide resonator.
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申请公布号 |
US5517085(A) |
申请公布日期 |
1996.05.14 |
申请号 |
US19930142667 |
申请日期 |
1993.10.25 |
申请人 |
ENGEMANN, JURGEN |
发明人 |
ENGEMANN, JUERGEN;WERNER, FRANK |
分类号 |
H01J37/32;H05H1/46;(IPC1-7):H05H1/46 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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