| 发明名称 |
Baffled collet for vacuum pick-up of a semiconductor die |
| 摘要 |
A vacuum collet (10) for picking up a semiconductor die (11). A plate (12) has a vacuum tube (15) and a downwardly extending skirt (19). Skirt (19) contacts the perimeter of die (11). The vacuum is distributed to the perimeter of the semiconductor die (10) by a baffle (16) interposed between the plate (12) and the die (11) and within the skirt (19).
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| 申请公布号 |
US5516125(A) |
申请公布日期 |
1996.05.14 |
| 申请号 |
US19940346957 |
申请日期 |
1994.11.30 |
| 申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
MCKENNA, ROBERT G. |
| 分类号 |
B25J15/06;B25B11/00;F16B47/00;H01L21/301;H01L21/677;H05K13/04;(IPC1-7):B25B11/00 |
主分类号 |
B25J15/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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