发明名称 |
High performance horizontal diffusion furnace system |
摘要 |
Performance of a high temperature diffusion furnace is enhanced by an improved multi-furnace module design. The furnace is constructed of materials suitable for clean room environments with an adjustable leveling frame assembly. A slide out assembly and heating element alignment mechanism of individual furnace tube modules with a heating element hoist mechanism allows for enhanced maintainability. Heat treatment performance is improved by a sealed heating element with individual furnace module cooling system. Improved thermocouple positioning and composition has also enhanced heat treatment process control and heating element maintainability.
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申请公布号 |
US5517001(A) |
申请公布日期 |
1996.05.14 |
申请号 |
US19950429799 |
申请日期 |
1995.04.27 |
申请人 |
THERMTEC, INC. |
发明人 |
PECK, KEVIN B.;ERICKSON, RONALD E.;MATTHEWS, STEPHEN H. |
分类号 |
F27D1/00;C30B31/10;F27B5/04;F27B5/14;F27D7/06;F27D21/00;H01L21/00;H01L21/22;H01L21/31;(IPC1-7):F27B5/16 |
主分类号 |
F27D1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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