发明名称 |
Device for measuring the thickness of thin films |
摘要 |
A thin film thickness measuring device is disclosed. The device includes an illuminator, a receiver and a beam deflector. The illuminator provides a collimated input light beam along an input axis. The receiver includes a lens and a diaphragm having a pinhole located at a focal point of the lens and receives a collimated output light beam along an output axis parallel to the input axis. The beam deflector is translatable at least along a scanning axis parallel to the input axis. The beam deflector directs the input light beam towards a sample and the output light beam from the sample towards the receiver.
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申请公布号 |
US5517312(A) |
申请公布日期 |
1996.05.14 |
申请号 |
US19940221724 |
申请日期 |
1994.04.01 |
申请人 |
NOVA MEASURING INSTRUMENTS, LTD. |
发明人 |
FINAROV, MOSHE |
分类号 |
G01B11/06;G01J4/00;G01N21/21;G01N21/41;G03F7/20;(IPC1-7):G01B11/06;G01B11/10 |
主分类号 |
G01B11/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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