| 摘要 |
PURPOSE: To improve the mechanical durability of a laminate by forming an intermediate film consisting of the metal oxide having a specified interatomic bonding strength between the respective layers of a multilayer film constituting the laminate. CONSTITUTION: A glass substrate is set in a vacuum chamber, the chamber is evacuated to a specified vacuum, gaseous Ar and O2 are introduced in a specified flow velocity ratio, and >=1 kind of metal M among Ti, Cr, Ta, Fe, Zr, Sn, Al, Si, Ni, Cu, W, etc., is used as a target and sputtered to form the film of such a metal as Ta2 O3 . Subsequently, a metal selected from Zn, In, Sb, Rb, Te, Yb, Bi, Cu and Ga is used as a target and sputtered with the same gas to form an intermediate film of a metal oxide such as ZnO having 5-50μm thickness and with the interatomic bonding strength controlled to 250-450KJ/mol. Further, the gas is changed to gaseous N2 , one kind of the metal M is used as a target and sputtered to form the film of a metal nitride such as TiNx , and a laminate excellent in mechanical durability is obtained.
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