发明名称 SEMICONDUCTOR DEVICE AND THE FABRICATING METHOD THEREOF
摘要 a semiconductor substrate; an insulation film formed on the semiconductor substrate and having an opening portion of which part is exposed to light; and a wiring layer of first conduction material. The conduction material is formed by burying the opening portion perfectly by heat treating process and includes up to 0.5 wt.% Si. In the wiring layer, Al spiking is prevented from generation. The manufactured semiconductor device has high reliability.
申请公布号 KR960006340(B1) 申请公布日期 1996.05.13
申请号 KR19920012082 申请日期 1992.07.07
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, SANG - INN;HONG, JUNG - INN;PARK, JONG - HO
分类号 H01L21/28;(IPC1-7):H01L21/28 主分类号 H01L21/28
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