发明名称 |
SEMICONDUCTOR DEVICE AND THE FABRICATING METHOD THEREOF |
摘要 |
a semiconductor substrate; an insulation film formed on the semiconductor substrate and having an opening portion of which part is exposed to light; and a wiring layer of first conduction material. The conduction material is formed by burying the opening portion perfectly by heat treating process and includes up to 0.5 wt.% Si. In the wiring layer, Al spiking is prevented from generation. The manufactured semiconductor device has high reliability.
|
申请公布号 |
KR960006340(B1) |
申请公布日期 |
1996.05.13 |
申请号 |
KR19920012082 |
申请日期 |
1992.07.07 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE, SANG - INN;HONG, JUNG - INN;PARK, JONG - HO |
分类号 |
H01L21/28;(IPC1-7):H01L21/28 |
主分类号 |
H01L21/28 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|