PROCESS FOR THE PREPARATION OF PLZT THIN FILM USING SEED LAYER

摘要

The method of fabricating a PLZT thin film using sol-gel process includes the steps of forming a seed layer by using a PLZT coating solution having a first composition and drying it, forming a thin film with a PLZT coating solution having a second composition on the PLZT thin film having the first composition and drying it, and heat-treating the dried thin film.