发明名称 PROCEDE DE DEPOT D'UN REVETEMENT PROTECTEUR DE TYPE PSEUDO CARBONNE DIAMANT AMORPHE
摘要 A method for depositing a hard protective coating on at least one part, wherein 10-70 % of nitrogen combined with 10-70 % of a mixture of helium and argon, or 10-70 % of neon for strongly exciting and dissociating the nitrogen and hydrogen, is added to a precursor gas, and the energy delivered to each atom of the precursor gas is selected so as to achieve so-called "Lifschitz" conditions which define the energy range in which a maximum number of diamond-like tetrahedral structures are produced instead of graphite structures.
申请公布号 FR2726579(A1) 申请公布日期 1996.05.10
申请号 FR19940013323 申请日期 1994.11.07
申请人 NEUVILLE STEPHANE 发明人
分类号 C23C14/00;C23C14/06;C23C16/26;C23C16/34;C23C16/50;(IPC1-7):C23C16/26;C23C16/22 主分类号 C23C14/00
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