| 摘要 |
FIELD: non-destructive tests of insulating and semiconductor films based on counting extremes of dependence of laser beam reflectance by film on varied angle of incidence of this beam on fixed measured film observed when angle of incidence of beam varies in specified range. SUBSTANCE: device has laser whose beam is directed onto flat mirror revolving about optical axis crossing its surface; first lens projecting image film point onto axis of revolution of flat mirror; and second lens projecting image of same point of film onto photodetector connected to recording instrument. With such arrangement of components, flat mirror rotation causes laser beam reflected by this mirror at point, which is image of film point being measured, to slide over lens surface and upon refraction by this lens it arrives at same point on film but at different positions, that is, at different angles. Second lens always directs beam reflected by film at point of measurement onto photodetector. As a result, recording instrument (such as oscilloscope) connected to photodetector records angular dependence of laser beam reflectance of analyzed film during flat mirror rotation. EFFECT: reduced cost of device due to dispensing with elliptical mirrors, enlarged functional capabilities. |
